JPH0432347B2 - - Google Patents
Info
- Publication number
- JPH0432347B2 JPH0432347B2 JP11639587A JP11639587A JPH0432347B2 JP H0432347 B2 JPH0432347 B2 JP H0432347B2 JP 11639587 A JP11639587 A JP 11639587A JP 11639587 A JP11639587 A JP 11639587A JP H0432347 B2 JPH0432347 B2 JP H0432347B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- probe needle
- relay
- fixed cover
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 39
- 239000000523 sample Substances 0.000 claims description 34
- 238000007689 inspection Methods 0.000 claims description 14
- 238000012360 testing method Methods 0.000 claims description 14
- 238000003780 insertion Methods 0.000 claims description 6
- 230000037431 insertion Effects 0.000 claims description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 12
- 238000000034 method Methods 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11639587A JPS63281079A (ja) | 1987-05-12 | 1987-05-12 | 半導体装置の検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11639587A JPS63281079A (ja) | 1987-05-12 | 1987-05-12 | 半導体装置の検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63281079A JPS63281079A (ja) | 1988-11-17 |
| JPH0432347B2 true JPH0432347B2 (en]) | 1992-05-29 |
Family
ID=14685977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11639587A Granted JPS63281079A (ja) | 1987-05-12 | 1987-05-12 | 半導体装置の検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63281079A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7458837B2 (en) | 2006-01-13 | 2008-12-02 | Advantest Corporation | Connector housing block, interface member and electronic device testing apparatus |
| JP4488438B2 (ja) * | 2006-01-13 | 2010-06-23 | 株式会社アドバンテスト | コネクタハウジングブロック、インターフェイス部材および電子部品試験装置 |
-
1987
- 1987-05-12 JP JP11639587A patent/JPS63281079A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63281079A (ja) | 1988-11-17 |
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